Patent EP4711626A1: Controlling Pneumatic Positioning Devices

ChangeBridge: EPO Bulletin - AI & Computing (G06N)

Published March 18th, 2026

Detected March 24th, 2026

Summary

The European Patent Office has published patent EP4711626A1 concerning a method for controlling pneumatic positioning devices and vacuum systems. The patent, filed by VAT Holding AG, details a system for deriving control parameters based on observed pressure and movement data, potentially impacting manufacturing processes.

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What changed

Patent EP4711626A1, published by the European Patent Office, describes a novel method for controlling pneumatic positioning devices and vacuum systems. The invention, assigned to VAT Holding AG, focuses on deriving control parameters by monitoring pressure variations and movement of an effecting element within a vacuum system. This method aims to optimize the control of such systems by processing observed parameters, including control signals and pressure readings, to determine when a specific position is reached.

This patent introduces a new technical approach to industrial automation and vacuum system control. While it does not impose direct regulatory obligations on companies, it represents a technological advancement that could influence future product development and manufacturing processes. Companies involved in semiconductor manufacturing, robotics, or any field utilizing precise pneumatic control in vacuum environments may find this patent relevant for understanding evolving technologies and potential intellectual property considerations.

Source document (simplified)

← EPO Patent Bulletin

LEARNING FOR CONTROLLING PNEUMATIC DRIVEN POSITIONING DEVICES

Publication EP4711626A1 Kind: A1 Mar 18, 2026

Applicants

VAT Holding AG

Inventors

GRASSO, Emanuele, ABDELAZIZ, Karim

Abstract

The invention relates to a method for providing controlling parameters for controlling a vacuum system (1), the vacuum system (1) comprises at least a first pneumatic positioning device (10) configured for moving and positioning an effecting element in a process atmosphere region which is providable by a vacuum process chamber, wherein the first pneumatic positioning device (10) comprises a first mount configured to hold the effecting element and a first pneumatic actuator which is connected to the first mount and which interacts with the first mount in such a way that the first mount is movable along a first movement axis. The system (1) also comprises a first control valve (21) connected to the first pneumatic actuator and to a first fluid supply (35) and configured to vary the pressure in the first pneumatic actuator to provide movement of the first mount, and a first fluid sensor (22) arranged and configured to measure the pressure of the first pneumatic actuator. The method further comprises applying a first controlling signal to the first control valve (21) to vary the pressure of the first pneumatic actuator and, by that, moving the first mount from a first starting position to a first end position, monitoring the varying pressure of the first pneumatic actuator by means of the first fluid sensor (22), determining when the first mount arrives at the first end position, and deriving the controlling parameters based on processing a set of observed parameters, wherein the set of observed parameters comprises at least the first controlling signal, the varying pressure, and an information concerning the arrival of the first mount at the first end position.

IPC Classifications

F15B 11/06 20060101AFI20250218BHEP F15B 11/10 20060101ALI20250218BHEP F15B 15/28 20060101ALI20250218BHEP F15B 19/00 20060101ALI20250218BHEP F16K 31/00 20060101ALI20250218BHEP H01L 21/687 20060101ALI20250218BHEP G06N 20/00 20190101ALI20250218BHEP F15B 20/00 20060101ALN20250218BHEP

Designated States

AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR

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