LEARNING FOR CONTROLLING PNEUMATIC DRIVEN POSITIONING DEVICES

Abstract

The invention relates to a method for providing controlling parameters for controlling a vacuum system (1), the vacuum system (1) comprises at least a first pneumatic positioning device (10) configured for moving and positioning an effecting element in a process atmosphere region which is providable by a vacuum process chamber, wherein the first pneumatic positioning device (10) comprises a first mount configured to hold the effecting element and a first pneumatic actuator which is connected to the first mount and which interacts with the first mount in such a way that the first mount is movable along a first movement axis. The system (1) also comprises a first control valve (21) connected to the first pneumatic actuator and to a first fluid supply (35) and configured to vary the pressure in the first pneumatic actuator to provide movement of the first mount, and a first fluid sensor (22) arranged and configured to measure the pressure of the first pneumatic actuator. The method further comprises applying a first controlling signal to the first control valve (21) to vary the pressure of the first pneumatic actuator and, by that, moving the first mount from a first starting position to a first end position, monitoring the varying pressure of the first pneumatic actuator by means of the first fluid sensor (22), determining when the first mount arrives at the first end position, and deriving the controlling parameters based on processing a set of observed parameters, wherein the set of observed parameters comprises at least the first controlling signal, the varying pressure, and an information concerning the arrival of the first mount at the first end position.

IPC Classifications