XACTIX

Abstract

Semiconductor manufacturing machines; Machines for microfabricated devices, semiconductor devices and MEMS devices, namely, etching machines and semiconductor wafer processing machines, and parts therefor; Etching equipment, namely, etching machines for microfabricated devices, semiconductor devices, and MEMS devices; Installation, upgrading, rebuilding, repair and maintenance of micro electromechanical systems, semiconductor, and/or microfabrication related apparatus and equipment, etching apparatus and equipment; Etching services for microfabricated devices, semiconductor devices and MEMS devices