Driving apparatus and inspection system
Assignee
CANON DENSHI KABUSHIKI KAISHA
Inventors
Tomohiro Tomaru, Hiroyuki Saito, Takashi Arai, Takamasa Kuboki, Riku Nonaka, Taku Kamura, Taro Ebisugi, Hironobu Sato, Masaru Senda
Abstract
A driving apparatus connectable to a driving target to be driven based on a plurality of powers, comprising a shaft body extending in a first direction, and a plurality of power generation units configured to generate the plurality of powers, respectively, and detachably attached to a periphery of the shaft body, wherein each power generation unit includes a power unit configured to generate power, a sensor unit configured to detect a state of the power generation unit, and a control unit configured to perform driving control of the power unit and externally output a signal of the sensor unit.
CPC Classifications
Filing Date
2024-11-25
Application No.
18958584
Claims
14