Heterogeneous architecture integration of silicon photodiode and accelerometer

Abstract

A novel, modified MEMS accelerometer with additional ability to measure optical radiation due to integration of silicon photodiode in the silicon cap. The silicon cap is used to protect the MEMS based accelerometer from the environment. The function of the cap is enhanced to include optical measurement. The entire sensor element including accelerometer and photodiode (XL+PD) occupies no more space than the XL alone.

CPC Classifications