TRAINING DEVICE, INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, TRAINING METHOD AND PROCESSING CONDITION DETERMINING METHOD

Abstract

A training device includes an experimental data acquirer that acquires a first processing amount indicating a difference between a film thickness obtained before a process for a film and a film thickness obtained after the process for the film, after a substrate processing apparatus is driven according to processing conditions including a variable condition that varies over time and executes the process for the film, and a model generator that generates a learning model, with the learning model executing machine learning using training data that includes the variable condition and the first processing amount corresponding to the processing conditions and predicting a second processing amount that indicates a difference between a film thickness obtained before the process for the film and a film thickness obtained after the process for the film wherein the learning model includes a first convolutional neural network.

CPC Classifications