ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN FORMING PROCESS
Publication
EP4703795A2
Kind: A2
Mar 18, 2026
Applicants
Shin-Etsu Chemical Co., Ltd.
Inventors
FUKUSHIMA, Masahiro, WATANABE, Satoshi, KOTAKE, Masaaki, MATSUZAWA, Yuta, MASUNAGA, Keiichi, HIROKAWA, Yoshito
IPC Classifications
G03F 7/004 20060101AFI20260210BHEP
G03F 7/039 20060101ALI20260210BHEP
C07C 309/42 20060101ALI20260210BHEP
C07C 381/12 20060101ALI20260210BHEP
C07D 327/08 20060101ALI20260210BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR