METHOD AND DEVICE FOR DETERMINING A TOPOGRAPHY CONTRAST AND/OR A MATERIAL CONTRAST OF A SAMPLE
Publication
EP4600637A1
Kind: A1
Mar 18, 2026
Applicants
Carl Zeiss SMT GmbH
Inventors
SCHWARZ, Daniel, EMMRICH, Daniel Alexander
IPC Classifications
G01N 23/2206 20180101AFI20250627BHEP
G03F 1/68 20120101ALI20250627BHEP
G03F 1/72 20120101ALI20250627BHEP
G03F 1/74 20120101ALI20250627BHEP
G03F 1/86 20120101ALI20250627BHEP
G06N 20/00 20190101ALI20250627BHEP
H01J 37/28 20060101ALI20250627BHEP
G01B 15/04 20060101ALN20250627BHEP
H01L 21/66 20060101ALN20250627BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR