PROCESS CONTROL KNOB ESTIMATION
Publication
EP4479810A1
Kind: A1
Mar 18, 2026
Applicants
Applied Materials, Inc.
Inventors
HONG, Jeong Jin, KIM, Sang Hong, JANG, Mihyun, LEE, Jin Kyeong, CHEON, Sejune
IPC Classifications
G05B 23/02 20060101AFI20260210BHEP
G06N 20/00 20190101ALI20260210BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR