RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, COMPOUND, AND ACID DIFFUSION CONTROL AGENT
Publication
EP2026028814A1
Kind: A1
Mar 18, 2026
Inventors
The designation of the inventor has not yet been filed
IPC Classifications
G03F 7/004 20060101AFI20260207BHEP
C07C 309/11 20060101ALI20260207BHEP
C07C 381/12 20060101ALI20260207BHEP
C07D 333/76 20060101ALI20260207BHEP
G03F 7/20 20060101ALI20260207BHEP
G03F 7/039 20060101ALI20260207BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR