RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, COMPOUND, AND POLYMER COMPOUND
Publication
EP2026028725A1
Kind: A1
Mar 18, 2026
Inventors
The designation of the inventor has not yet been filed
IPC Classifications
G03F 7/039 20060101AFI20260207BHEP
C07D 305/06 20060101ALI20260207BHEP
C07D 307/12 20060101ALI20260207BHEP
C07D 309/06 20060101ALI20260207BHEP
C07D 407/12 20060101ALI20260207BHEP
C08F 12/22 20060101ALI20260207BHEP
C08F 20/26 20060101ALI20260207BHEP
G03F 7/20 20060101ALI20260207BHEP
G03F 7/027 20060101ALI20260207BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR