ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Publication
EP2026028674A1
Kind: A1
Mar 18, 2026
Inventors
The designation of the inventor has not yet been filed
IPC Classifications
G03F 7/039 20060101AFI20260207BHEP
C07D 211/00 20060101ALI20260207BHEP
C07D 235/18 20060101ALI20260207BHEP
C07D 295/26 20060101ALI20260207BHEP
C07D 295/088 20060101ALI20260207BHEP
C07D 307/56 20060101ALI20260207BHEP
C07D 327/06 20060101ALI20260207BHEP
C07D 333/76 20060101ALI20260207BHEP
C08F 212/14 20060101ALI20260207BHEP
C08F 220/10 20060101ALI20260207BHEP
G03F 7/004 20060101ALI20260207BHEP
G03F 7/20 20060101ALI20260207BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR