DEVICE FOR MEASURING PROCESS PARTICLES IN REAL TIME AND METHOD FOR PREDICTING DEFECTIVENESS OF NANO-ELEMENT IN REAL TIME USING SAME
Publication
EP2024195896A1
Kind: A1
Mar 18, 2026
Inventors
The designation of the inventor has not yet been filed
IPC Classifications
G01N 15/02 20240101AFI20240927BHEP
G01N 15/10 20240101ALI20240927BHEP
G06N 3/08 20230101ALI20240927BHEP
B07C 5/34 20060101ALI20240927BHEP
G01N 15/00 20240101ALI20240927BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR