RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, COMPOUND, AND ACID DIFFUSION CONTROL AGENT
Publication
EP2024190919A1
Kind: A1
Mar 18, 2026
Inventors
The designation of the inventor has not yet been filed
IPC Classifications
G03F 7/004 20060101AFI20240920BHEP
C07B 61/00 20060101ALI20240920BHEP
C07C 69/78 20060101ALI20240920BHEP
C07C 381/12 20060101ALI20240920BHEP
C07D 333/76 20060101ALI20240920BHEP
G03F 7/20 20060101ALI20240920BHEP
G03F 7/039 20060101ALI20240920BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR