COMPOUND FOR PHOTOLITHOGRAPHIC DIELECTRIC COMPOSITION, POLYMER, AND PHOTOLITHOGRAPHIC DIELECTRIC COMPOSITION
Publication
EP2024187508A1
Kind: A1
Mar 18, 2026
Inventors
The designation of the inventor has not yet been filed
IPC Classifications
C08G 8/20 20060101AFI20240920BHEP
C07D 311/78 20060101ALI20240920BHEP
G03F 7/004 20060101ALI20240920BHEP
G03F 7/11 20060101ALI20240920BHEP
Designated States
AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, ME, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR